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BS ISO BRITISH STANDARD 24236:2005 Surface chemical analysis Auger electron spectroscopy Repeatability and constancy of intensity scale ICS 71.040.40 BSi NO COPYING WITHOUT BSI PERMISSION EXCEPT AS PERMITTED BY COPYRIGHT LAW British Standards BSISO24236:2005 National foreword This British Standard reproduces verbatim IS0 24236:2005 and implements it as the UK national standard. The UK participation in its preparation was entrusted to Technical Committee CII/60, Surface chemical analysis, which has the responsibility to: aid enquirers to understand the text; present to the responsible international/European committee any enquiries on the interpretation, or proposals for change, and keep the UK interests informed; monitor related international and European developments and promulgate them in the UK. A list of organizations represented on this committee can be obtained on request to its secretary. Cross-references The British Standards which implement international publications referred to in this document maybe found inthe BSI Catalogue under the sectionentitled "International Standards Correspondence Index", or by using the“Search" facility of the BSI Electronic Catalogue or of British Standards Online. This publication does not purport to include all the necessary provisions of a contract. Users are responsible for its correct application. Compliance with a British Standard does not ofitself confer immunity from legal obligations. Summary of pages This document comprises a front cover, an inside front cover, the ISO title page, pages ii to v, a blank page, pages 1 to 14, an inside back cover and a back cover. The BSI copyright notice displayed in this document indicates when the document was last issued. Amendmentsissuedsincepublication This British Standard was published under the authority Amd. No. Date Comments of the Standards Policy and Strategy Committee on 12May 2005 @ BSI 12 May 2005 ISBN 0 580 45967 5 BSIS024236:2005 ISO INTERNATIONAL STANDARD 24236 First edition 2005-04-15 Surface chemical analysis Auger electron spectroscopy Repeatability and constancy of intensity scale Analyse chimique des surfaces-Spectroscopie d'electrons Auger- Repeétabilite etconstancede l'echelle d'energie Reference number ISO 24236:2005(E) BS IS0 24236:2005 = BS IS0 24236:2005 Contents Page Foreword iv Introduction 1 Scope 2 Symbols 3 Outline of method 4 Method for evaluatingtherepeatabilityand constancyof the intensity scale.. 4.1 Obtainingthereferencesample... 4.2 Mounting the sample. 4.3 Cleaning the sample.. 4.4 Choosingthe spectrometersettingsforwhich intensitystabilityistobedetermined 4.5 Operatingtheinstrument.... 4.6 Optionsforinitialorsubsequentevaluationmeasurements 4.7 Measurementsforthe intensityand repeatability... 4.8 Calculating the peak intensities, intensity ratios and uncertainties 4.9 4.10 Next evaluation.. Annex A (informative) Example of calculations and measurements of the intensity repeatability foracommercialAugerelectronspectrometer.. 10 Bibliography .. 14 ili BSIS024236:2005 Foreword IsO (the International Organization for Standardization) is a worldwide federation of national standards bodies InternationalElectrotechnicalCommission(lEC)onallmattersofelectrotechnicalstandardization International Standards are drafted in accordance with the rules given in the ISO/lEC Directives, Part 2 adopted by the technical committees are circulated to the member bodies for voting. Publication as an International Standard requires approval by at least 75 % of the member bodies casting a vote rights. IsO shall not be held responsible for identifying any or all such patent rights. ISO24236waspreparedbyTechnicalCommitteeISO/TC201,Surfacechemicalanalysis,Subcommittee SC 7,X-rayphotoelectron spectroscopy. iv BSIS024236:2005 Introduction Auger electron spectroscopy (AES) is used extensively for the surface analysis of materials. Elements in the sample (with the exception of hydrogen and helium) are identified from comparisons of the

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